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BA0505T system is equipped with direct-cooling cathodic arc source, ion beam pre-cleaning/etching source and PID controlled heater. And substrate holder is specially designed with capability of rotation and bias connection.
It enables users to build their own modular process recipe for various coating applications. Additionally, BA0505T also provides a user-friendly control system that allows the operator to monitor the system status through a graphic touch screen.
Plus accurate pressure control by Manometer, pressure drift during process can be absolutely avoided. So BA0505T can provide good quality films with excellent repeatability.
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