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Procudts / FCVA ta-C film Source
 

 
The company is able to offer the following deposition and etching sources for vacuum applications
  • Sputtering source: we are able to offer linear rectangular and circular sources to for sputtering. We are able to offer up to 1 meter linear magnetron sputtering source that suitable to deposit various materials.
  • Ion beam source: we are able to design and fabricate the grid less ion beam source that able to use as cleaning and reactive purpose. Rectangular source up to 1 m can be made.
We are able to customize the sources to various deposition chambers. The sources can be mounted internally or externally.

 

 

Magnetron Sputtering Source

Magnetron Sputtering Source

 
 
 
  • Widely used in varios metalization.
  • High purity of the thin film.
  • Size(up to 1 meter liner) and shape(rectangular or circular)
          customised
  • Supported by high voltage/high frequency pulsed DC
          generator.





  •  
    Ion Beam Source

    Ion-Beam Source

     
     
     
  • Widely used in substrate cleaning before coating.
  • The size and shape can be designed according to
         customer's requirement.
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