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This decoating(RIE) system comes with two electrode configurations:
 De-coating System
• Samples can be placed on RF (or DC pulse)
energised, water-cooled sample holding plate.
Gas is delivered by the top grounded gas
shower plate.
• Alternatively, for some special recipes, RF (or
DC pulse) can be applied on the gas shower
plate to generate reactive plasma to perform
reactive etching gently on samples placed on
water –cooled sample holding plate.
De-coating System
The specially designed gas shower plate ensures uniform gas delivery on samples, thus ensures the etching uniformity.
Two stage rotary vane pump or dry pump is used for the process with upgradeable path to add a turbo-molecular pump.
Control of the system is by PLC with touch screen panel PC. Process monitoring & automated routines for pumping, venting, interlock and monitoring. Alarms are included.
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FCVA
