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Procudts / FCVA ta-C film Source
 

 

The FS series is protected with the world wide patents (nos). We offer various configurations of FCVA sources for commercial and academic purposes. We are the world leading FCVA maker that is able to provide an industrially viable source that meets today most demanding requirements ranging from:

 

 

   • Utilizing graphite target to generate almost 100% pure carbon plasma to form
      tetrahedral amorphous carbon (ta-C) film
   • Ability to use for most kinds of metals
   • Ability to control the erosion of the target uniformly
   • Ability to use for long operational hour
   • The position of the plasma beam can be programmed to obtain uniform coating
   • Unique power supply for the biasing
   • Ability to run with feedback control based on the plasma density to be
      precisely control the final thickness


FCVA Source

Slider Source

Trimless-media Source
Metal Source

Co-deposition Source


R&D Source
Mutil-target Source
 
Ta-c film source:
 

Our Tetrahedral Amorphous Carbon Film Source (ta-C Film Source) uses patented Filtered Cathodic Vacuum Arc (FCVA) technology to provide ultra-thin film deposition.

The FCVA source can produce high quality ta-C film which conform to stringent requirements, and are suitable for many industrial applications.

These thin films are produced with unsurpassed uniformity and excellent repeatability.The FCVA source can be readily clustered with other system platforms without affecting the overall performance. 		 
 
 
 
 
Application:


Metal film source:
 

Our Filtered Cathodic Vacuum Arc Source can also be used to provide ultra-thin metal film deposition, up to now, most of popular metal materials had been tried in our FCVA metal source, such as Cu, Al, Ti, W, etc.

The metal FCVA source is ready for industrial application. Because of its higher and tunable Ion energy, customers can expect more uniform, dense and clean metal thin film

  
 
Application:
 
Related Coating System
  • Nanofilm offer the following coating systems for production and R&D.
Coating System:
 
 
   
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