Nanofilm specializes on various vacuum metalization technologies that able to provide functional and decorative coating for various applications. The metals are Cu, Al, Cr, Ti and others.

Our FCVA technology has the capability of producing large area of ultra pure metal coating with an excellent uniformity at room temperature. Metal film made by FCVA has consistent low resistivity close to that of a bulk material when the film thickness is above 120nm. Metal coating species by FCVA is 100% ions. It has a narrow yet adjustable energy distribution. It totally eliminates overhang problem for high A/R (Aspect Ratio) trenches. It also has excellent bottom-up filling property which can not be realized by other deposition methods.